This survey is concerned with the use of silicon nitride in the semi conductor and microelectronics industries. The Handbook of Electronic Materials, volume 3, comprises part 1 of this survey and includes preparation and properties information. This report was prepared by Hughes Aircraft Company, Culver City, California under Contract Number F336lS-70-C-1348. The work was admini stered under the direction of the Air Force Materials Laboratory, Air Force Systems Command, Wright-Patterson Air Force Base, Ohio, with Hr. B. Emrich, Project Engineer. The Electronic Properties Information Center (EPIC) is a designated Information Analysis Center of the Department of Defense, authorized to pro vide information to the entire DoD community. The purpose of the Center is to provide a highly competent source of information and data on the electronic, optical and magnetic properties of materials of value to the Department of Defense. Its major function is to evaluate, compile and publish the experi mental data from the world's unclassified literature concerned with the properties of materials. All materials relevant to the field of electronics are within the scope of EPIC: insulators, semiconductors, metals, super conductors, ferrites, ferroelectrics, ferromagnetics, electroluminescents, thermionic emitters and optical materials. The Center's scope includes information on over 100 basic properties of materials; information generally regarded as being in the area of devices and/or circuitry is excluded. v CONTENTS Foreword. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 Diffusion Mask Applications . . . . . . . . . . . .. . . . . . . . . . . . . . . '" 11 Glass-to-Metal Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 Passivation Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 Isolation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 Memory Devices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 Capacitors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76 Radiation Hardening Applications . . . . . . . . . . . . . . . •. . . . . . . . .
Erscheinungsdatum: 21.01.2013

lgrsnf/A:\compressed\10.1007%2F978-1-4615-9609-7.pdf

nexusstc/Silicon Nitride for Microelectronic Applications: Part 2 Applications and Devices/5e680e6d3621902ec8c4abd4972e0ba2.pdf

zlib/Engineering/John T. Milek (auth.)/Silicon Nitride for Microelectronic Applications: Part 2 Applications and Devices_2108481.pdf

by John T. Milek

Handbook of electronic materials, v. 3, etc, Boston, MA, 1972

United States, United States of America

Springer Nature, New York, NY, 2013

Boston, MA, United States, 1972

1, 2013

lg954584

{"edition":"1","isbns":["1461596092","1461596114","9781461596097","9781461596110"],"last_page":117,"publisher":"Springer US"}

Online full text is restricted to subscribers.
Also available in print.
Mode of access: World Wide Web.

This survey is concerned with the use of silicon nitride in the semiƯ conductor and microelectronics industries. The Handbook of Electronic Materials, volume 3, comprises part 1 of this survey and includes preparation and properties information. This report was prepared by Hughes Aircraft Company, Culver City, California under Contract Number F336lS-70-C-1348. The work was adminiƯ stered under the direction of the Air Force Materials Laboratory, Air Force Systems Command, Wright-Patterson Air Force Base, Ohio, with Hr. B. Emrich, Project Engineer. The Electronic Properties Information Center (EPIC) is a designated Information Analysis Center of the Department of Defense, authorized to proƯ vide information to the entire DoD community. The purpose of the Center is to provide a highly competent source of information and data on the electronic, optical and magnetic properties of materials of value to the Department of Defense. Its major function is to evaluate, compile and publish the experiƯ mental data from the world's unclassified literature concerned with the properties of materials. All materials relevant to the field of electronics are within the scope of EPIC: insulators, semiconductors, metals, superƯ conductors, ferrites, ferroelectrics, ferromagnetics, electroluminescents, thermionic emitters and optical materials. The Center's scope includes information on over 100 basic properties of materials; information generally regarded as being in the area of devices and/or circuitry is excluded. v CONTENTS Foreword. ... ... ... ... ... ... ... ... v Introduction. ... ... ... ... ... ... ... . . 1 Diffusion Mask Applications ... ... ... ... ... '" 11 Glass-to-Metal Seals ... ... ... ... ... ... . 23 Passivation Applications ... ... ... ... ... ... 24 Isolation ... ... ... ... ... ... ... ... 39 Memory Devices. ... ... ... ... ... ... ... 41 Capacitors. ... ... ... ... ... ... ... ... 76 Radiation Hardening Applications ... ... ..." ...

Front Matter....Pages i-vii
Introduction....Pages 1-10
Diffusion Mask Applications....Pages 11-22
Glass-to-Metal Seals....Pages 23-23
Passivation....Pages 24-38
Isolation....Pages 39-40
Memory Devices....Pages 41-75
Capacitors....Pages 76-86
Radiation Hardening Applications....Pages 87-98
Miscellaneous Devices and Applications....Pages 99-108
Back Matter....Pages 109-117

Diffusion Mask Applications.- Glass-to-Metal Seals.- Passivation Applications.- Isolation.- Memory Devices.- Capacitors.- Radiation Hardening Applications.- Miscellaneous Devices and Applications.- References

2013-08-01